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Nanopositioning Stage Product List

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0.1 nm resolution nanopositioning stage P-752

0.1 nm resolution nanopositioning stage P-752

High-speed piezo stage with a maximum stroke of 35 µm, a resolution of 0.1 nm, and a load capacity of 10 N.

The P-752 is an excellent single-axis nanopositioning stage with a flexure guide structure that incorporates a two-electrode capacitive sensor, achieving zero friction and outstanding straightness (pitch and yaw error ±1μrad), with an open-loop resolution of 0.1nm. Additionally, the built-in capacitive sensor measures the actual moving parts non-contactly at a sub-nanometer level, providing higher linearity and hysteresis compensation, ensuring long-term stability. *For more details, please download the PDF or contact us.*

  • Actuator
  • Piezoelectric Devices
  • Solenoid Actuators
  • Nanopositioning Stage

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Microscope Nano Positioning Stage 'DOF-5'

Microscope Nano Positioning Stage 'DOF-5'

High performance at low cost! Achieving fast stepping and stabilization while maintaining image stability!

The "DOF-5" is a low-cost, high-performance nanopositioning stage optimized for optical imaging applications. It features a large travel range (5mm) and bandwidth (over 225Hz), achieving fast stepping and alignment while maintaining image stability. Additionally, volume discounts are available. 【Features】 ■ A cost-effective alternative to expensive piezo stages for microscopes ■ Volume discounts available ■ Optimized for optical imaging applications ■ Low-cost and high-performance ■ Achieves fast stepping and alignment while maintaining image stability * You can download the English version of the catalog. * For more details, please refer to the PDF document or feel free to contact us.

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XYZ Axis Nano-Level Precision Piezo Stage with Aperture P-733

XYZ Axis Nano-Level Precision Piezo Stage with Aperture P-733

Reproducibility ±1nm, XY axis 100 µm + Z axis 10 µm stroke, optimal for transmitted light with a 50 mm aperture.

This is an XYZ-axis nanopositioning stage that performs direct measurement using high-reliability PICMA piezoelectric drive and capacitive sensors. The XY-axis motion range is available in 30 x 30 µm and 100 x 100 µm types, while the Z-axis has a stroke of 10 µm. With an aperture of 50 x 50 mm, it is also ideal for transmitted light applications. It is used in high-precision microscopy, mask/wafer positioning, measurement technology, and more. *For more details, please download the PDF or contact us.*

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  • Piezoelectric Devices
  • Cartesian Robot
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Nano Positioning Stage P-752 for Measurement Instruments

Nano Positioning Stage P-752 for Measurement Instruments

High-precision nanopositioning with a maximum stroke of 35 µm and a resolution of 0.1 nm.

In the field of measurement and evaluation, calibration and micro-positioning require nanometer-level resolution and high positional reproducibility. The P-752 is a linear piezo flexure stage equipped with a maximum stroke of 35 µm and a minimum resolution of 0.1 nm (when used with an appropriate controller). Its flexure guide structure enables smooth operation without friction or backlash, achieving high straightness. This supports stable micro-positioning in the calibration and evaluation processes of precision measurement instruments. 【Application Scenarios】 - Calibration and performance evaluation of precision measurement instruments - Alignment and positional correction of optical systems - Micro-displacement control in sensor evaluation and material testing 【Benefits of Implementation】 - Nanometer-level positioning resolution - High reproducibility operation without backlash - Stabilization of measurement accuracy through stable micro-displacement control

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Nano Positioning Stage P-752 for Biotechnology

Nano Positioning Stage P-752 for Biotechnology

High-precision nanopositioning stage optimal for bioanalysis

The P-752 is a high-precision piezo nano positioning stage with a maximum stroke of 35 µm and a maximum resolution of 0.1 nm. Its flexure guide structure and high-resolution capacitive sensors (closed-loop specification) achieve high reproducibility and stability while minimizing the effects of hysteresis. It provides reliable positioning performance in the field of biotechnology, where nanometer precision is required for applications such as cellular-level observation and manipulation of fine samples. 【Application Scenarios】 - Precision focusing in fluorescence microscopy and confocal microscopy - Nanoscale position control of cells and organoids - Micromanipulation - Biosensor evaluation and nano-level alignment 【Benefits of Implementation】 - High-precision positioning with a maximum resolution of 0.1 nm - High reproducibility and stability through closed-loop control - Compatibility for integration into microscopes and analytical devices due to compact design - Improved measurement efficiency through fast response

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[For Measurement] XYZ Axis Precision Positioning Stage P-561~563

[For Measurement] XYZ Axis Precision Positioning Stage P-561~563

PIMars precision nano stage that achieves probe positioning with sub-nanometer accuracy.

In high-precision measurement, the positioning accuracy of the probe affects the reliability of the measurement results. Even slight vibrations or crosstalk can be sources of error, necessitating stable nanopositioning achieved through high rigidity and closed-loop control. The P-561, P-562, and P-563 PIMars Nanopositioning Stages are XYZ multi-axis piezo flexure stages that utilize a parallel kinematics structure and capacitive sensors. They achieve a reproducibility of ±2 nm and linearity of 0.03%, enabling high-precision probe positioning with low crosstalk. With high resonance frequency and excellent dynamic characteristics, they are suitable for high-speed scanning measurements and micro-displacement measurements. They are ideal for precision measurement applications such as semiconductor inspection and nanomaterial analysis. 【Application Scenarios】 - Semiconductor inspection - Super-resolution microscopy - Photonics alignment 【Benefits of Implementation】 - Achievement of high-precision measurement results - Reduction of measurement time - Improvement of product quality

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Nano Positioning Stage P-752 for Nanotechnology

Nano Positioning Stage P-752 for Nanotechnology

Nano positioning with a maximum stroke of 35 µm and a minimum resolution of 0.1 nm.

In the field of nanotechnology, the fabrication and evaluation of structures require positioning resolution at the nanometer level and high reproducibility. The P-752 is a linear piezo flexure stage equipped with a maximum stroke of 35 µm and a minimum resolution of 0.1 nm (when used with the appropriate controller). Its flexure guide structure enables smooth operation without friction or backlash, achieving high straightness. It provides stable micro-displacement control for research and development applications that require positioning control at the nanoscale. 【Application Scenarios】 - Micro-positioning in nanostructure fabrication - Sample/probe position control in scanning probe microscopy (SPM) - Precision alignment in microfabrication processes - Evaluation of nanomaterials and surface analysis 【Benefits of Implementation】 - Nanometer-level positioning resolution - High reproducibility operation without backlash - Stabilization of micro-displacement control

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High-precision Z stage for nano positioning with 0.1nm resolution

High-precision Z stage for nano positioning with 0.1nm resolution

0.1 nm resolution and 0.02% linearity. Improved manufacturing and measurement accuracy with sub-nanometer Z-axis control.

In the nanotechnology manufacturing industry, sub-nanometer positioning accuracy is essential for microfabrication and precision measurement. Particularly in semiconductor manufacturing and the production processes of MEMS devices, even slight positional shifts can significantly impact product quality. The P-620.Z to P-622.Z models achieve high reliability and long lifespan through a combination of a frictionless flexure guide system and PICMA piezo actuators, contributing to the stabilization of manufacturing processes. [Application Scenarios] - Wafer inspection in semiconductor manufacturing - Microfabrication in MEMS device manufacturing - Precision measurements such as interferometers and confocal microscopes [Benefits of Implementation] - Improved yield in manufacturing processes - Enhanced product quality - Increased measurement accuracy You can check the detailed product specifications in the catalog. If you have any questions, please feel free to contact us.

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